2D AND 3D OPTICAL MEASUREMENT

NEXIV VMF-K Series

Non-contact 3D geometry with confocal speed and detail

Simultaneous 2D imaging and height measurement for semiconductors, probe cards, bonding wires, thin films and precision-engineered components.

NEXIV VMF-K Series
2D + 3DSimultaneous measurement
0,01 μmMinimum readout
3 modelosUp to 650 × 610 mm
ConfocalComplex surfaces
NIKON NEXIV ECOSYSTEM

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PRODUCT HIGHLIGHTS

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Features that connect the technology to metrology results and productivity.

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Higher throughput

Up to 1.5× throughput in applications such as probe cards.

2D e altura no mesmo campo

2D and height in one field

Capture coordinates and topography without repositioning the part.

Materiais difíceis

Difficult materials

Measures high-contrast surfaces, transparent materials and thin films.

CONFIGURATIONS

Match the system to the part size

Model / functionEnvelope / capabilityLoad / application
VMF-K3040300 × 400 × 150 mm20 kg
VMF-K6555650 × 550 × 150 mm30 kg
VMF-K6561650 × 610 × 150 mm30 kg
APPLICATIONS

Where it creates value

Probe cards and bonding wires
Wafer-level packaging
PLP panels up to 600 × 600 mm
Thin films and resists
Substrates and microcomponents
DOCUMENTATION AND VIDEO

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NM3D TECHNICAL SELECTION

The right configuration starts with the part

Send the size, tolerance, material and throughput. We recommend the right optics, envelope, software and automation.

NEXIV VMF

Nikon's NEXIV VMF-K series revolutionizes optical measurement by combining high-speed 2D and 3D capabilities with exceptional accuracy. Its advanced confocal system increases throughput for diverse samples, supporting miniaturization in the semiconductor and precision engineering industries.

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NEXIV VMF-K Series

NEXIV VMF-K3040

Nikon's NEXIV VMF-K3040 is an advanced measurement system that is ideal for automatic measurement of components with high accuracy. It has a measuring area of 300 mm (X), 400 mm (Y) and 200 mm (Z), offering a wide field of view. The advanced confocal system allows you to capture detailed and accurate images of various materials and objects, supporting miniaturization and increasing productivity in the semiconductor and precision engineering industries.


   



NEXIV VMF-K6555

Nikon's NEXIV VMF-K6555 is a sophisticated measurement system that is ideal for automatic measurement of components with high accuracy. With a measuring area of 650 mm (X), 550 mm (Y) and 200 mm (Z), it offers an extensive field of view. Its advanced confocal system ensures the capture of detailed and accurate images of various materials and objects. This model supports miniaturization and increases productivity, making it essential for the semiconductor and precision engineering industries.



NEXIV VMF-K Series

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