The NEXIV VMF-K series, developed by Nikon Metrology, is a confocal measurement system that combines high-speed 2D and 3D capabilities, offering exceptional precision. This system was designed to support component miniaturization, being especially effective in the semiconductor and precision engineering industries. Thanks to its advanced confocal technology, it enables detailed measurements, even on complex and challenging samples, such as transparent materials and high-contrast surfaces. Watch Video
Context and challenge
The continuous miniaturization of semiconductor components and the increasing complexity of electronic device architectures demand measurement systems capable of performing precise inspections at ever-smaller scales. The semiconductor and precision engineering industries require solutions that combine speed, precision, and versatility to ensure quality control in increasingly demanding production processes.
The solution or technology
The NEXIV VMF-K series offers fast measurements by combining 2D analysis and height functionalities in a single system. With performance 1.5 times superior to previous models, this device enables simultaneous 2D and height measurements, significantly reducing measurement time without compromising precision.
The system stands out for its ability to measure a wide range of components, including semiconductor devices such as probe cards and bonding wires. This flexibility makes the system an essential tool for quality control in the semiconductor sector, consolidating multiple measurement functions in a single piece of equipment.
The series is equipped with a 45x objective lens, ideal for wafer-level package (WLP) measurements. This high magnification is fundamental for detailed inspection of ultrafine structures, especially important as semiconductor components continue to decrease in size.
The system enables accurate measurement of extensive dimensions, exceeding the field of view limit, while maintaining constant precision. This functionality is essential for measuring semiconductor devices that demand high positional accuracy and precise coordinate system measurements at larger scales.
The advanced confocal optical system ensures stable measurements, even on samples with high contrast. This capability guarantees clear and precise images, even when samples present significant variations in brightness or reflectivity.
Available models:
NEXIV VMF-K3040: Advanced measurement system, ideal for automatic measurement of components with high precision. Features a measurement area of 300 mm (X), 400 mm (Y), and 200 mm (Z), offering a wide field of view. The advanced confocal system enables capturing detailed and precise images of various materials and objects, supporting miniaturization and increasing productivity in the semiconductor and precision engineering industries.
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NEXIV VMF-K6555: Sophisticated measurement system, ideal for automatic measurement of components with high precision. With a measurement area of 650 mm (X), 550 mm (Y), and 200 mm (Z), it offers an extensive field of view. Its advanced confocal system guarantees the capture of detailed and precise images of various materials and objects. This model supports miniaturization and increases productivity, being essential for the semiconductor and precision engineering industries.
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Industrial applications
Advanced Packaging: The NEXIV VMF-K series enables simultaneous 2D and height analysis within a single field of view, ideal for advanced packaging processes. Equipped with a 45x objective lens, it is capable of performing precise measurements at scales below 2 μm, addressing the challenges posed by increasingly complex semiconductor device architectures.
Probe Card Inspection: The NEXIV VMF-K series significantly improved probe card measurement throughput, increasing speed by 1.5 times compared to previous versions. Additionally, the ability to perform stable measurements beyond the field of view facilitates the inspection process, ensuring precise and efficient quality control.
Wafer Inspection: The NEXIV VMF-K series uses advanced confocal optics, enabling inspection of surfaces with variable reflectivity, essential for semiconductor wafer analysis. The 45x objective lens captures minute details, while simultaneous 2D and height measurement optimizes inspection efficiency, reducing time spent on each cycle.
Substrate Production: Designed for substrate inspection workflows, the NEXIV VMF-K series guarantees stable measurements, even on complex samples such as transparent and high-contrast materials. With scanning 1.5 times faster than previous generations, this system maintains the precision required for the highest standards in the substrate production industry.Results and benefits
The NEXIV VMF-K series enables companies to perform fast and precise measurements, contributing to improved throughput and efficiency in measurement and quality control operations. The system simplifies inspection processes by consolidating multiple measurement functions in a single piece of equipment, optimizing production processes and ensuring final product quality. Measurement speed 1.5 times superior to previous models significantly reduces cycle time without compromising precision, essential for industries dealing with component miniaturization and packaging.
How NM3D can help
NM3D Ibérica offers significant value to its customers by providing not only Nikon Metrology's advanced technology, but also specialized local technical support. Our team is ready to provide calibration services, ongoing training, and technical assistance, ensuring that equipment is properly implemented and maintains optimal performance over time. With the NEXIV VMF-K Series, NM3D Ibérica enables companies in the Iberian Peninsula to achieve new levels of efficiency and precision in their measurement processes, providing ideal solutions to improve quality control and optimize the production of electronic and semiconductor components.
Would you like to assess this solution for your application?
Contact us to learn how we can help optimize your production with advanced measurement solutions. Contact Email: sac@nm3diberica.com