NEXIV VMF-K Series – Advanced Confocal Optical Measurement System

19 March 2025 by
NEXIV VMF-K Series – Advanced Confocal Optical Measurement System
Carolina Carvalho

The NEXIV VMF-K series, developed by Nikon Metrology, is a confocal measurement system that combines high-speed 2D and 3D capabilities, offering exceptional accuracy. This system was designed to support the miniaturisation of components, being especially effective in the semiconductor and precision engineering industries. Thanks to its advanced confocal technology, it enables detailed measurements, even on complex and challenging samples, such as transparent materials and high-contrast surfaces.

At NM3D Ibérica, we are pleased to offer this advanced system to our customers, providing a solution that optimises production processes and ensures the quality of the final products. The NEXIV VMF-K series allows companies to perform fast and precise measurements, contributing to improved yield and efficiency in measurement and quality control operations.

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Main Features of the NEXIV VMF-K Series

Faster and More Effective Measurements

The NEXIV VMF-K series offers fast measurements by combining 2D analysis and height measurement functionalities into a single system. With performance 1.5 times greater than previous models, this device allows simultaneous 2D and height measurements, significantly reducing measurement time without compromising accuracy.

Versatility in Various Applications

The NEXIV VMF-K series stands out for its ability to measure a wide range of components, including semiconductor devices such as probe plates and wire bonds. This flexibility makes the system an essential tool for quality control in the semiconductor industry, consolidating multiple measurement functions into one piece of equipment, thus simplifying inspection processes.

Specialised Support for the Semiconductor Industry

The NEXIV VMF-K series is equipped with a 45x objective lens, ideal for wafer-level measurements (WLP). This high magnification is essential for detailed inspection of ultrathin structures, especially important as semiconductor components continue to shrink in size.

Long Dimension Measurement Capability

The NEXIV VMF-K series allows accurate measurement of extended dimensions, exceeding the field of view limit, while maintaining consistent precision. This functionality is essential for measuring semiconductor devices, which require high positional accuracy and precise measurements in the coordinate system on larger scales.

Stable Measurements on High-Contrast Surfaces

The advanced confocal optical system of the NEXIV VMF-K series ensures stable measurements even on samples with high contrast. This capability ensures clear and accurate images, even when samples have significant variations in brightness or reflectivity.

Large-Scale Measurement with High Precision

The NEXIV VMF-K series allows for precise measurements on components whose dimensions exceed the device’s field of view, always maintaining accuracy. This feature is crucial for semiconductor device measurements that require high precision over large dimensions and for coordinate system measurements.


Models of the NEXIV VMF-K Series

NEXIV VMF-K3040

Nikon's NEXIV VMF-K3040 is an advanced measurement system that is ideal for automatic measurement of components with high accuracy. It has a measuring area of 300 mm (X), 400 mm (Y) and 200 mm (Z), offering a wide field of view. The advanced confocal system allows you to capture detailed and accurate images of various materials and objects, supporting miniaturization and increasing productivity in the semiconductor and precision engineering industries.


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NEXIV VMF-K6555

Nikon's NEXIV VMF-K6555 is a sophisticated measurement system that is ideal for automatic measurement of components with high accuracy. With a measuring area of 650 mm (X), 550 mm (Y) and 200 mm (Z), it offers an extensive field of view. Its advanced confocal system ensures the capture of detailed and accurate images of various materials and objects. This model supports miniaturization and increases productivity, making it essential for the semiconductor and precision engineering industries.


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Industrial Applications of the NEXIV VMF-K Series

Probe Card Inspection

The NEXIV VMF-K series has significantly improved the measurement throughput of probe cards, increasing speed by 1.5 times compared to previous versions. Additionally, the ability to perform stable measurements beyond the field of view simplifies the inspection process, ensuring precise and efficient quality control. NM3D Ibérica applies this technology to streamline and accelerate inspections while maintaining high levels of accuracy.

High-Precision Wafer Inspection

The NEXIV VMF-K series utilises advanced confocal optics, enabling the inspection of surfaces with variable reflectivity—essential for semiconductor wafer analysis. The 45x objective lens captures fine details, while simultaneous 2D and height measurement optimises inspection efficiency, reducing the time spent on each cycle. This technology is crucial for ensuring quality and precision in semiconductor manufacturing.

Efficient Substrate Production and Measurement Precision

Designed for substrate inspection workflows, the NEXIV VMF-K series ensures stable measurements even on complex samples, such as transparent and high-contrast materials. With scanning 1.5 times faster than previous generations, this system maintains the precision required for the highest standards in the substrate manufacturing industry. NM3D Ibérica ensures that production processes are carried out quickly, efficiently, and with absolute precision.


Advanced Packaging with the NEXIV VMF-K Series

The NEXIV VMF-K series enables simultaneous 2D and height analysis within a single field of view, making it ideal for advanced packaging processes. Equipped with a 45x objective lens, it can perform precise measurements at scales below 2 μm, addressing the challenges posed by increasingly complex semiconductor device architectures. This system is an excellent choice for industries dealing with component miniaturisation and packaging.


Support from NM3D Ibérica

NM3D Ibérica provides significant value to its customers by offering not only Nikon Metrology's advanced technology but also specialised local technical support. Our team is ready to provide calibration services, continuous training, and technical assistance, ensuring that equipment is properly implemented and maintains optimal performance over time.

With the NEXIV VMF-K Series, NM3D Ibérica enables companies in the Iberian Peninsula to achieve new levels of efficiency and precision in their measurement processes, offering ideal solutions to improve quality control and optimise the production of electronic and semiconductor components.

Contact us to learn how we can help optimise your production with advanced measurement solutions.

Contact details

Email: sac@nm3diberica.com